A nafion coated capacitive humidity sensor on a flexible PET substrate
S. Sapsanis, U. Buttner, H. Omran, Y. Belmabkhout, O. Shekhah, M. Eddaoudi, K.N. Salama
IEEE 59th International Midwest Symposium on Circuits and Systems (MWSCAS), Abu Dhabi, UAE, (2017)
Flexible humidity sensor, Nafion, PET, capacitive structures, laser engraving
This paper reports a simple and low-cost technique for fabricating low-power capacitive humidity sensors without the use of a cleanroom environment. A maskless laser engraving system was utilized to fabricate two different gold electrode structures, interdigitated electrodes and Hilbert’s fifth-order fractal. The capacitive structures were implemented on a flexible PET substrate. The usage of Nafion, a well-known polymer for its hydrophilic properties as a sensing film, was attempted on the PET and outperformed the current effort s in flexible substrates. Its humidity sensing properties were evaluated in an automated gas
setup with a relative humidity (RH %) ranging from 15% to 95 %.
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